Fabrication Technique and Preliminary Analysis of a Tri-axis Micro-Gyroscope

• Main Authors: Chih-Che Lin, 林志哲
• Other Authors: Nan-Chyuan Tsai
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/09835274390075393687

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 96 === The purpose of this thesis is to design and fabricate an innovative tri-axis micro-gyroscope. The proposed micro-gyroscope is capable to detect three-dimensional angular motions simultaneously, reduce coupling effect via novel mechanical design, and improve the bandwidth of sense modes. The dynamics of the tri-axis micro-gyroscope is developed by Lagrange’s equation. Several performance indices are discussed, such as sensitivity, quality factor, resolution etc. ANSYS simulation software is employed concurrently to analyze the mode shapes of the system. In addition, merely a single mask with surface micro-machining is utilized to fabricate the micro-structure so that the alignment errors and fabrication defects due to multiple masks can be reduced. Finally, the modification and combination of the correlation double sampling circuit and differential capacitance circuit are applied for sensing signal processing. On the other hand, the driving circuit composed of automatic gain control loop and phase lock loop is used to stabilize the driving force. The feasibility of the proposed circuit is verified by commercial software HSPICE. The efficacy for various angular rates detection is verified.