Measurement of Coplanarity and Warpage of Electronic Components Using Shadow Moire Method

• Main Authors: Ching-Chao Chen, 陳璟照
• Other Authors: Terry Yuan-Fang Chen
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/65515152280977541978

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 96 === In this paper, the major purpose is to develop a method to determine the coplanarity quickly and to measure the coplanarity and warpage of electronic components using shadow moiré method. The time of calculating the coplanarity can be decreased effectively. In the beginning, we describe the definition of coplanarity and warpage in electronic industry, and improve the original method to search coplananrity in a shorter period of time. Then, we introduce the original theory of Shadow Moire, and establish optical measuring system by using Shadow Moire method, phase shifting method, phase unwrapping method…etc. About the accuracy of our system, we measure the correction glass with low coefficient of expansion, BK7. First, we measure of the correction sample using surface roughness measuring instrument ET3000 to examine the accuracy of our system at normal temperature, and simulate six different types of profile to examine the correctness.