Virtual Metrology Management System Design and Implementation

碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 96 === Based on the automatic virtual metrology (AVM) technology, a virtual metrology management system (VMMS) is designed and implemented in this thesis. The VMMS has capabilities of automatic model creation, automatic model fanning out, monitoring and managing AVM...

Full description

Bibliographic Details
Main Authors: Shi-Jie Zhang, 張世杰
Other Authors: Min-Hsiung Hung
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/35537119108159927891