Virtual Metrology Automatic Model Refreshing Scheme for Fab-wide Deployment
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 96 === This research devises a virtual metrology automatic model refreshing scheme for fab-wide deployment of the virtual metrology (VM) systems in the semiconductor and TFT-LCD industries. The functionality of the proposed scheme is to create a conjecture model as...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09197634619649250935 |