Developing a Wafer Yield Prediction Model Using Particle Swarm Optimization Neural Networks
碩士 === 國立交通大學 === 工業工程與管理系所 === 96 === For integrated circuit (IC) manufacturers, the wafer yield is a key index to evaluate their process capability. As the wafer size increase, the defects clustering phenomenon tends to be significant, and the phenomenon leads to the inverse relationship between t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04348552480448623528 |