Advanced Process Control in Deep Trench Poly Hard Mask Open Etch Process
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 96 === This study proposes an Advanced Process Control (APC) method to control the critical dimension (CD) of Deep Trench Poly Hard Mask Open (DTPHMO) process. The correlation analysis method and regression analysis method are used to build up the prediction...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71484617340428689879 |