The Study of Chemical Vapor Deposition Thickness Prediction in Semiconductor Manufacturing

碩士 === 國立交通大學 === 資訊學院碩士在職專班資訊組 === 96 === Applying back propagation neural network(BPNN) to predict the yield in semiconductor has bean proposed in the recently years. Because too many network parameters need to be adjusted in the training phase, it is more complicated. Afterward a scholar purposes...

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Bibliographic Details
Main Author: 蔡智豪
Other Authors: 林昇甫
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/40184625477205299174