A Study of Characteristics of Poly-Si Nanowire Thin-Film Transistors Fabricated by LTPS Technique
碩士 === 國立交通大學 === 電子工程系所 === 96 === In this thesis, low-temperature poly silicon (LTPS) technique is employed to fabricate TFTs with poly-Si nanowire (NW) channels. Rapid thermal annealing (RTA) not only possesses a good selective heating function with specific materials, but the process time and th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78331805592952938766 |