The Growth of Non-polar a-GaN Thick Film by Hydride Vapor Phase Epitaxy(HVPE)
碩士 === 國立交通大學 === 電子物理系所 === 96 === In this research, we will focus on the growth process and analysis for how to get high quality non-polar GaN thick film by HVPE(hydride vapor phase epitaxy). Rather than the traditional technique to grow polar -GaN through hetereoepitaxy, we want to develop the no...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/ew8pnf |