Output Disturbance Observer Structure Applied to Run-to-Run Control for Semiconductor Manufacturing
碩士 === 國立交通大學 === 機械工程系所 === 96 === The purpose of this thesis aims to present the design of the Run-to-Run (RtR) controller by using the Output Disturbance Observer (ODOB) structure. In recent years, RtR control has been widely used and realized in semiconductor manufacturing, such as etch, photol...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33039990133115224059 |