The Microstructure and Nanomechanical Properties of ZnO Thin Films
碩士 === 國立交通大學 === 機械工程系所 === 96 === In this study, the ZnO thin films were deposited onto Si (100) substrate by ratio frequency sputtering with various RF power at 50, 100, 150, 200, and 300 W and the surface morphologies, crystalline structural, and nanomechanical properties of ZnO thin films wer...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17747223007346970979 |