The Implementation of Cascade Electrostatic CMOS-MEMS Comb-Drive Actuator
博士 === 國立交通大學 === 電機與控制工程系所 === 96 === Electrostatic comb-drive actuators have been developed and employed for many applications. However, side instability (side pull-in) limits the actuator stroke constraining its applications. Hence, extending actuation stroke is an important issue for designing e...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/42311733968179226640 |