The Implementation of Cascade Electrostatic CMOS-MEMS Comb-Drive Actuator

• Main Author: 郭秦輔
• Other Authors: 邱俊誠
• Format: Others
• Language: en_US
• Online Access: http://ndltd.ncl.edu.tw/handle/42311733968179226640

博士 === 國立交通大學 === 電機與控制工程系所 === 96 === Electrostatic comb-drive actuators have been developed and employed for many applications. However, side instability (side pull-in) limits the actuator stroke constraining its applications. Hence, extending actuation stroke is an important issue for designing electrostatic comb-drive actuators. In this dissertation, two cascade electrostatic comb-drive actuators, namely cascade lateral electrostatic comb-drive actuator and cascade vertical electrostatic comb-drive actuator are developed for improving the stroke of electrostatic comb-drive actuators. With the cascade configuration, the actuation stroke can be improved greatly. To implement the cascade electrostatic comb-drive actuators, the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 μm two polysilicon layers and four metal layers (2p4m) complementary metal-oxide-semiconductor (CMOS) and post-CMOS micromachining steps are employed to fabricate the device. Due to the multilayer characteristic of the microstructure, the electric signal isolation and vertical motion can be achieved. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 200% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators.