Particle Research and Solution for Black Diamond Film Baking
碩士 === 國立交通大學 === 電機學院碩士在職專班電機與控制組 === 96 === Applied Material’s low-k solution they called “Black Diamond” seem is the winner of the race. Although Applied Material claim their Black Diamond low-k dielectric solution do not need the baking procedure, but most IC manufacturer implement the Black Dia...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/50163175104127626140 |