Particle Research and Solution for Black Diamond Film Baking

碩士 === 國立交通大學 === 電機學院碩士在職專班電機與控制組 === 96 === Applied Material’s low-k solution they called “Black Diamond” seem is the winner of the race. Although Applied Material claim their Black Diamond low-k dielectric solution do not need the baking procedure, but most IC manufacturer implement the Black Dia...

Full description

Bibliographic Details
Main Authors: Chi-Min Liao, 廖啟銘
Other Authors: Jen-Chung Lou
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/50163175104127626140