Advanced Process Control for PECVD Equipment Using Kalman Filter and Minimum Variance Controller
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 96 === This thesis proposes an advanced process controller which combines kalman filter and Minimum Variance Controller (MVC) to improve the process variance of Pad-Boron Silicon Glass (Pad-BSG) of Plasma Enhanced-Chemical Vapor Deposition (PE-CVD) process....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21360849871474412621 |