Process development to synthesize single-walled carbon nanotubes arrays by ECR-CVD
碩士 === 國立交通大學 === 工學院半導體材料與製程產業專班 === 96 === Processes to synthesize the catalyst-assisted single walled carbon nanotubes (SWNTs) on Si wafer were developed by oxygen-plasma pretreatment and electron cyclotron resonance chemical vapor deposition (ECR-CVD), using CH4 and H2 as source gases, Co, Ni an...
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| Format: | Others |
| Language: | zh-TW |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44088480506875861144 |