Study of Organic Thin Film Transistor with High-k Material by Using Low-temperature Supercritical Technology
碩士 === 國立交通大學 === 電機學院光電顯示科技產業專班 === 96 === In this study, supercritical fluids (SCF) technology is employed originally to effectively improve the properties of low-temperature-deposited metal oxide dielectric films and fabricate organic silicon thin film transistors (OTFTs). In this work, 7 nm ultr...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/4ktdkf |