The investigation of abatement of PFCs and VOCs exhaust gases from semiconductor industries
博士 === 國立中央大學 === 化學工程與材料工程研究所 === 96 === The evolution of semiconductor industries promotes the economic development of Taiwan, but it also results in environmental pollution problems. The employment of a variety of chemicals during the semiconductor manufacturing process is very complicate due to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/tca24g |