The Study of Antireflection Coating on Plastic Substrates by Reactive Sputtering
碩士 === 國立中央大學 === 光電科學研究所碩士在職專班 === 96 === The thesis uses plasma emission monitor system and dual cathode technology to conduct the process of oxide thin film sputtering process, and uses this process in the Roll to Roll plastic film sputter equipment, to control the exact amount of oxygen, and to...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s39jmm |