Fabrication and Carrier Transport Mechanism of Nonvolatile Germanium Quantum Dots Imbedded in Oxide-Nitride Composite Tunnel Dielectric MOS-Capacitors

碩士 === 國立中央大學 === 電機工程研究所 === 96 === This article investigates the integration of multi-layer Ge QDs, high-K material, composite dielectrics and stair-case energy barrier for nonvolatile memory, and analyzes the advantages and disadvantages of the MOS-capacitors with these terms of charge storage, r...

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Bibliographic Details
Main Authors: Shu-Hao Hsu, 許書豪
Other Authors: Pei-Wen Li
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/tz3e88