Optical and mechanical properties of TiO2 thin films deposited on glass and PET substrates by DC magnetron sputtering
碩士 === 國立中央大學 === 光電科學研究所 === 96 === In this research, titanium oxide (TiO2) thin films were fabricated by DC reactive magnetron sputtering with titanium target at room temperature. Ion assisted deposition (IAD) was also conducted during the thin film deposition. The working gas was argon and oxygen...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33842147011911746153 |