High-Resolution X-Ray Diffraction Analysis of Semiconductor Heterostructures

碩士 === 國立彰化師範大學 === 電子工程學系 === 96 === In this thesis, we use high-resolution x-ray diffraction (HRXRD) to measure and analyze semiconductor heterostructures, including GaAs//InGaA/InAlAs metamorphic high electron mobility transistors (HEMT), InP//InAlAs/InGaAs high In concentration HEMT, GaAsSb/GaAs...

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Bibliographic Details
Main Authors: Shun-Hsiang Ke, 柯順祥
Other Authors: Jenq-Shinn Wu
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/28630946364787149464