Study of COMS-MEMS Micro Sensor Array
碩士 === 國立彰化師範大學 === 機電工程學系 === 96 === In this thesis, we develop a highly integration system chip based on CMOS MEMS and Nontechnology. The system chip compose the MEMS elements and circuit, and this technology is usually use in novel MENS IC design. Use the digital circuit to be multiplexer to cont...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12463983802974728389 |