Simulations and analysis of measurement of small displacement based on multiple total internal reflections and heterodyne interferometry
碩士 === 國立彰化師範大學 === 機電工程學系 === 96 === In this thesis, a method for measuring small displacements is presented based on the phenomenon of multiple total-internal reflections and heterodyne interferometric technique. The optical system of our method consists of a heterodyne light source, piezoelectric...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67382422102716686056 |