Patterning Technology of Microstructure Arrays Using Nanoimprint Lithography
碩士 === 國立彰化師範大學 === 顯示技術研究所 === 96 === In this paper, we study flexible polydimethylsiloxane (PDMS) as master molds to imprint. Without using any release agent, we use PDMS as soft molds to imprint the feature by hot or UV curing. Then micro-structure of spherical array features are transferred on P...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86677612505291781695 |