Optimal Regulator Design for a Two-Dimantional Piezopositioning stage
碩士 === 國立東華大學 === 電機工程學系 === 96 === This thesis focuses on the topics concerning about modeling and tracking control of a two-dimensional piezopositioning stage. In the system modeling, the frequency response Bode diagram of piezopositioning stage is captured by a dynamic signal analyzer (DSA). From...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22shyf |