| Summary: | 碩士 === 國立東華大學 === 電機工程學系 === 96 === This thesis focuses on the topics concerning about modeling and tracking control of a two-dimensional piezopositioning stage. In the system modeling, the frequency response Bode diagram of piezopositioning stage is captured by a dynamic signal analyzer (DSA). From the Bode diagram, a second-order and a third-order transfer function are established by the Curve Fitting toolbox of MATLAB computer software. On the basis of these transfer functions, the control approach for trajectory tracking of the piezopositioning stage is proposed.
Instead of using the trial-and-error method, the linear quadratic regulator (LQR) method is adopted in the proposed control approach to find the appropriate parameter values. To show the validity of the proposed control approach, the control algorithm was implemented on a computer and then experimental results from the computer-controlled piezopositioning were illustrated.
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