Application of an alternating phase-shifting mask design method to near field photolithography for fabricating high frequency SAW devices
博士 === 國立高雄第一科技大學 === 工程科技研究所 === 96 === Surface-acoustic wave(SAW) devices operating at frequencies in the 1 to 3 GHz-range will be widely used for mobile, wireless, cable modem, cellular phone and remote control applications, if the devices are characterized with the properties such as miniaturize...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/t2j57x |