The Design of Auto-heating System in LED Wafer
碩士 === 國立屏東科技大學 === 機械工程系所 === 96 === Recently, The promotion in LED(Light Emitting Diode) throughput and light density, the complexity of element figure in micro-photo process and line width shrinkage , photo-resist dosage solidification in thin film process , more difficult control in soft and har...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68988919779842531557 |