Study on the growth parameters and characteristic of diamond like carbon thin film

碩士 === 國立中山大學 === 電機工程學系研究所 === 96 === Diamond-Like Carbon (DLC) films have been deposited on different substrates such as p-type Silicon substrate and ITO glass substrate. DLC thin film was electrodeposited at low DC potential using a mixture of acetic acid and DI water. The DLC film deposition par...

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Bibliographic Details
Main Authors: Ge-Jian Shr, 施各建
Other Authors: Herng-Yih Ueng
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/ju29g3