Performance analysis of run-to-run controllers subject to metrology delay and virtual metrology and the development novel run-to-run control approach
博士 === 國立清華大學 === 化學工程學系 === 96 === Two problems encountered in many semiconductor manufacturing are metrology delay caused by the equipments and mixture products on producing. For this thesis, we develop some controllers to eliminate the influences of two problems. First, focusing on the metrology...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78572003687996472232 |