Microstructure and Magnetic Properties of Fe-Co-Hf Based Soft Magnetic Thin Films Fabricated by Magnetron Sputtering for Radio-Frequency Applications
碩士 === 國立清華大學 === 材料科學工程學系 === 96 === Soft magnetic thin films with high saturation magnetization and resistivity are of great interest in micro-inductor for the magnetic device application. In this study, amorphous Fe–Co–Hf–N thin films with a gradient concentration of Hf doping were fabricated by...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80200812390195864744 |