Investigation into Formation and Friction effect in Direct Nanoimprint: Molecular Dynamics Analysis and Experiment
博士 === 國立清華大學 === 動力機械工程學系 === 96 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05771467767091954189 |