The Research on Flexure Hinges with Taguchi Method and FEA
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 96 === By the high technology for next generation, ultra-precision position and micro displacement is the key object. Those years, the researcher used piezoelectric actuator and flexure hinges to do some design for nanometer position. In semiconductor process, beside...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cxfr96 |