A Study of High-sensitivity (Pb,Ca)TiO3 Pyroelectric Thin Film Infrared Thermal Array Image Sensor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 96 === In this experiment, the pyroelectric Pb0.7Ca0.3TiO3, (PCT) film is deposited on the silicon substrate through the Radio-Frequency Magnetron Sputtering System and the integrated pyroelectric thin film infrared image detectors with three different MOSFET structure...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89526074781932787196 |