A Study of 64×64 Pixels Thermal Insulated Structure for (Pb,Ca)TiO3 Pyroelectric Thin Film Infrared Image Sensors
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 96 === Abstract In this experiment, pyroelectric Pb0.7Ca0.3TiO3, (PCT) film is deposited on silicon substrate through the Radio-Frequency Magnetron Sputtering System and the integrated pyroelectric film infrared image detector is manufactured. For contrast of correspo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50691113625312903679 |