Fabrication of Benzocyclobutene Multimode Interference Devices by Ultraviolet Laser Illumination

碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === Buried-type benzocyclobutene (BCB) multimode interference (MMI) optical power splitters fabricated by the ultraviolet laser illumination are presented. The devices of interest are 1 4, 2 2, and 4 4 MMI devices. The BCB polymer is illuminated by 248nm krypton flu...

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Bibliographic Details
Main Authors: Yu-Shuan Chang, 張宇萱
Other Authors: Way-Seen Wang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/46453448588527043607