Fabrication of Benzocyclobutene Multimode Interference Devices by Ultraviolet Laser Illumination
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === Buried-type benzocyclobutene (BCB) multimode interference (MMI) optical power splitters fabricated by the ultraviolet laser illumination are presented. The devices of interest are 1 4, 2 2, and 4 4 MMI devices. The BCB polymer is illuminated by 248nm krypton flu...
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/46453448588527043607 |