Si Nanocrystal Based Colorful Metal-Oxide-Semiconductor Light Emitting Diodes
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === By changing the RF plasma power during the PECVD system, photoluminescence (PL) wavelength control of Si-rich SiOx film was proposed. The O/Si composition ratio increased as the RF power increased, which was confirmed by TEM XEDS. After high temperature anneal...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/87926733174085647560 |