Reduction of Computations in the Mask Design of Inverse Optical Microlithography
碩士 === 國立臺灣大學 === 電機工程學研究所 === 96 === In the field of microlithography the demand for highly integrated electronic circuits has motivated investigations into better image resolutions. Inverse lithography technique is a revived resolution enhancement technique (RET), which could decrease semiconducto...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99350155004672250243 |