Design and Development of a 3-axes Close-looped Nano-scale Positioning System
碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === High-resolution position stage is the footstone of the precision technology. A nano-level resolution positioning stage plays a important role in the development of nanotechnology. This paper proposes a 3-axis positioning stage built up by piezoelectric actuators...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63657062282174958741 |