Research on the positioning control of a co-planar stage embedded with an ultrasonic motor
碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === Abstract As electronic semiconductor industry is booming, precision positioning is getting more and more attention. In order to achieve precise positions on submicrometer/nanometer levels, piezoelectric material becomes mechanism designer''s first choi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54177597749914388669 |