The Design and Control of an Anti-vibration Platform using Disturbance Response Decoupling Techniques
碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === This thesis emphasizes on the design and vibration control of an optical table. Due to the resolution requirement of semiconductor processing, vibration control of the system is increasingly important. Generally speaking, two kinds of disturbances, namely load d...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/18624730047584328854 |