Measuring Method of Etch Rate for Concave Corner Lattice Planes

碩士 === 國立臺灣大學 === 應用力學研究所 === 96 === The focus of this thesis is two dimensional etch theory, which use geometric method to treat the relationship between the basic of etch length rate and etch rate. The thesis develop a completed experimental process and measuring method of etch rate for concave co...

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Bibliographic Details
Main Authors: Ling-Yi Chu, 朱凌毅
Other Authors: Chia-Ou Chang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/70123704910909544509