Measuring Method of Etch Rate for Concave Corner Lattice Planes

• Main Authors: Ling-Yi Chu, 朱凌毅
• Other Authors: Chia-Ou Chang
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/70123704910909544509

碩士 === 國立臺灣大學 === 應用力學研究所 === 96 === The focus of this thesis is two dimensional etch theory, which use geometric method to treat the relationship between the basic of etch length rate and etch rate. The thesis develop a completed experimental process and measuring method of etch rate for concave corner lattice planes, which can predict collect etch rate and lattice plane’s miller indices by means of using stereogram and wulff net. On the basis of two dimensional etch theory, the experiment use（110）wafer and KOH solution in 40 % and 80℃ condition. The thesis accumulate experimental data for KOH etch process’s database.