Amorphous Hydrogenated Silicon Compounds as Passivation Layers for n-type Si IBC Solar Cell
碩士 === 國立臺灣科技大學 === 化學工程系 === 96 === This research focused on different materals characterization for passivation layers, such as a-Si:H, a-SiCx , a-SiOx , a-SiNx , and a-SiCONx . We used low temperature and low power density plasma process to make a new structure of IBC solar cell by UHV-CVD, tripl...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51686708591395267930 |