Study of annealing effects on the properties of ZnO thin films deposited by ion beam sputtering deposition
碩士 === 國立臺灣科技大學 === 電子工程系 === 96 === ZnO thin films were deposited on (100) silicon substrates by capillaritron ion beam sputtering deposition. ZnO thin films were annealed in oxygen, nitrogen and in atmospheric condition at various temperatures. Effects of annealing on the properties of ZnO thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80882874603039853425 |