The study and characterizations of InN film with AlN buffer layer by magnetron sputtering
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 96 === In this dissertation we studied the deposition of Indium Nitride and Aluminum Nitride thin-film using the DC magnetron sputtering and Radio frequency magnetron sputtering. Process parameters of deposited thin-film were studied. Systematic analysis were achieved...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80605257991193915484 |