A study on the Bi0.5Sb1.5Te3 thermoelectric thin films prepared by RF magnetron sputtering
碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 96 === Thermoelectric thin films of Bi0.5Sb1.5Te3 were prepared on SiO2/Si substrates by radio-frequency (RF) magnetron sputtering. The Bi0.5Sb1.5Te3 casting alloy was used as target. In order to enhance the transport properties of thin films, annealing in argon amb...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66097854039199986128 |