Fabrication of p-type ZnO thin film with low resistivity by RF magnetron sputtering
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === The ZnO thin film has been of great interest because of potential applications for optoelectronic devices. However, a p-type ZnO film conduction with low resistivity is difficult to achieve because of self-compensation effect of the opposite charge carriers...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vvz7k2 |