An Electric-Optical Measurement System for Rotational Error with the Nano-Meter Resolution
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === This study developed a novel electric-optical measuring system to measure the rotation-spindle errors with the nanometer resolution. It is composed of a plano-concave mirror, a DVD pickup, and a quadrant detector. The plano-concave mirror was fixed on the ro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/m73j85 |